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Table-top high-harmonic generation sources feeding industry-relevant characterization needs.
March 24, 2021
By: Anthony Locicero
The emergence of new materials to support semiconductor device scaling drives new characterization needs.  Table-top high harmonic generation (HHG) sources feeding advanced imaging and spectroscopy techniques complementing those found at synchrotron sites are being examined as a potential source to fill these needs.  This is the beating heart of the AttoLab, a game-changing, multifunctional characterization facility initiated by imec in collaboration with KMLabs and SPECS.  Mater...
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